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发明名称
摘要
申请公布号
JPH01156550(U)
申请公布日期
1989.10.27
申请号
JP19880054987U
申请日期
1988.04.21
申请人
发明人
分类号
H01L21/673;H01L21/02;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/673
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代理人
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