摘要 |
PURPOSE:To improve the sterilizing effect on the circulating air and in a clean room by installing an ozonizer, directional control valve and deodorizing catalyst-packed vessel both in the downstream from the ozonizer, and a bypass pipe for returning the air to the clean room without passing through the deodorizing catalyst-packed vessel. CONSTITUTION:By means of a circulating fan 2 the circulating air in a clean room 1 is sent to an ozonizer 3, where the air is made to pass through an electric discharge part, that is, between a cathode electrode 21 and an anode electrode 22, and from thence, during the daytime, through a directional control valve 4, deodorizing catalyst- packed vessel 5, and filter 6, and returned to a clean room 1; while during the night, the air is made to flow from the directional control valve 4 through a bypass 7 to the filter 6 and return to the clean room 1. An enhanced sterilization effect on the circulating air can be achieved by the passage through the ozonizer 3 wherein bacteria and molds in the circulating air are exterminated or brought in a state of suspended animation by high voltage field strength (for example, 24kV, 60Hz). The deodorizing catalyst-packed vessel 5 may be filled with, for example, a ternary compound oxide of titanium, silicon and zirconium as a deodorizing catalyst. After deodorization in a deodorizing catalyst-packed vessel 5, the circulating air is made to pass through the filter 6. |