| 摘要 |
PURPOSE:To decide the presence and absence of a defect with simply overlapping a video signal image-picked-up by means of an image pickup camera, and to make a device constitution simpler and a processing faster by correcting the deformation of checked work and a position posture angle by means of an XY stage, a theta stage and a zoom lens multiplying factor. CONSTITUTION:To a work measuring part 20, a video output signal (a) is inputted from a check reference work image pickup camera 9, a video output signal (b) is inputted from the checked work image pickup camera 10, and the part 20 exchanges a moved position control signal (c) at the section of a stage control part 21, a multiplying factor control signal (d) at the section of a zoom lens control part 22, and a check control signal (e) at the section of a defect checking part 23. An angle correcting signal (f) is sent from the stage control part 21 to a theta axis driving motor 5 of a checked work mounting stand 6, and the posture between check reference work 3 and checked work 4 is made to correspond. Simultaneously, an L multiplying factor altering command signal (g) is outputted from the zoom lens control part 22 to a check work image pickup zoom lens 8. Thereafter, the presence and absence of the defect is decided by the difference between the video output signals (a) and (b) of the image pickup camera by the defect checking part 23. Thus, the high-speed processing is attained. |
