发明名称 |
FOERFARANDE FOER FRAMSTAELLNING AV KERAMRAOMATERIAL. |
摘要 |
The invention relates to a process for the production of silicon ceramic whiskers and silicon ceramic powder from silicon fluoride and ammonia or a hydrocarbon, at an elevated temperature. According to the invention, the hydrocarbon or ammonia (4) is decomposed separately at a high temperature into reactive carbon or nitrogen and hydrogen, whereafter the carbon or nitrogen radical thus obtained is further in a gas phase contacted with reactive silicon formed therein from silicon difluoride, in order to deposit finely-divided silicon nitride or silicon carbide out from the gas phase. |
申请公布号 |
FI895095(A0) |
申请公布日期 |
1989.10.26 |
申请号 |
FI19890005095 |
申请日期 |
1989.10.26 |
申请人 |
KEMIRA OY |
发明人 |
JUDIN, VESA-PEKKA;HAEYHAE, AARNO;KOUKKARI, PERTTI |
分类号 |
C01B21/068;C01B31/36;C04B35/565;C04B35/584;C30B25/00;(IPC1-7):C01B/ |
主分类号 |
C01B21/068 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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