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发明名称
ZERSTAEUBUNGSKATHODE NACH DEM MAGNETRON-PRINZIP
摘要
申请公布号
DE3812379(A1)
申请公布日期
1989.10.26
申请号
DE19883812379
申请日期
1988.04.14
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
MAASS, WOLFRAM, DR., 6455 ERLENSEE, DE;CORD, BERNHARD, DR., 8755 ALZENAU, DE;FERENBACH, DAGMAR, 5100 AACHEN, DE;MARTENS, THOMAS, 8752 KROMBACH, DE;WIRZ, PETER, DR., 6296 WALDENBACH, DE
分类号
C23C14/34;G11B15/29;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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