| 摘要 |
<p>In apparatus for measuring the AC electrical parameters of a Device-Under-Test (DUT), 205, such as a resistor, a capacitor or an inductor, at the desired frequency of a signal while applying a DC bias 208 to the DUT 205, an inductor 211 having a high impedance even in the low-frequency range and a low DC resistance is artificially formed by an electronic circuit (Fig. 3(a). By using the thus formed artificial inductor 211, measurement error due to low impedance of the inductor 211 in the low-frequency range and measurement error due to the DC offset caused by a high DC resistance are prevented. The input equivalent noise of an amplifier 203 is also prevented from being amplified by the amplifier 203. Thus, the high precision measurement of the AC electrical parameters of the DUT can be obtained. High DC bias voltage can be applied to the DUT 205 due to the DC blocking operations of a capacitor 212. <IMAGE></p> |
