| 摘要 |
The present invention concerns a vibrating force sensor comprising a metallic strip having three metallic coplanar beams (20, 21, 22). The sensor also includes capacitive (30, 31) means for driving the beam or beams into flexural vibration in a plane normal to their common plane and for detecting changes in the frequency of vibrations in response to changes in tension applied to the sensor. The capacitive means comprising drive and detect electrodes (50, 51) formed on the surface of an intermediate insulating layer (70) in turn located on the surface of a shielding layer (71) of conductive material. |
