发明名称 CARRY CONTROL METHOD FOR AUTOMATIC WAFER CARRYING SYSTEM
摘要 <p>PURPOSE:To improve carrying efficiency by separating a transshipping control between a warehouse and a cassette pick-up device from another transshipping control among a pick-up device, a carrier and a transshipping equipment so as to let them be processed in parallel, and thereby letting the control be selected based on both the presence of an empty box on the pick-up device and the carrying direction. CONSTITUTION:When requisition for carry-in/out is made by a transshipping equipment 4, it is checked whether or not an empty box is rested on No.1 and No2. stations 21a and 21b of a cassette pick-up device 2. And when it is found that there exists no empty box, a command is issued so that a transshipment is controlled between an automatic storing warehouse 1 and the station 21a or 21b of the cassette pickup-up device 2 in which no empty box is available. Thus, after an empty box control has been assumed, both cassette delivery between the cassette pick-up device 2 and a carrier 3 and cassette delivery between the carrier 3 and the transshipping equipment 4 are controlled. By this constitution, waiting time for the transshipping equipment and the carrier can be reduced, carrying efficiency can thereby be improved.</p>
申请公布号 JPH01267202(A) 申请公布日期 1989.10.25
申请号 JP19880095756 申请日期 1988.04.20
申请人 OKI ELECTRIC IND CO LTD 发明人 TAGAMI RYOICHI
分类号 B65G1/137;B65G1/00 主分类号 B65G1/137
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