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发明名称
COOLING SYSTEM FOR SEMICONDUCTOR TEST SYSTEM
摘要
申请公布号
JPH01267472(A)
申请公布日期
1989.10.25
申请号
JP19880097253
申请日期
1988.04.19
申请人
NEC KYUSHU LTD
发明人
TAKASHIGE YOSHIFUMI
分类号
G01R31/26;H01L21/66;H01L23/46;H01L23/467
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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