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发明名称
POSITION DETECTING METHOD AND APPARATUS
摘要
申请公布号
EP0329433(A3)
申请公布日期
1989.10.25
申请号
EP19890301476
申请日期
1989.02.16
申请人
CANON KABUSHIKI KAISHA
发明人
SUDA, SHIGEYUKI;SAITOH, KENJI;MATSUGU, MASAKAZU;ABE, NAOTO;YOSHII, MINORU;KURODA, RYO
分类号
G03F9/00;(IPC1-7):G03F9/00;G01B11/14
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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