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发明名称
HIGH RESOLUTION PHOTORESIST OF IMIDE CONTAINING POLYMERS
摘要
申请公布号
EP0234327(A3)
申请公布日期
1989.10.25
申请号
EP19870101252
申请日期
1987.01.29
申请人
ALLIED CORPORATION
发明人
ALLIED CORPORATION
分类号
G03C1/72;G03F7/004;G03F7/023;G03F7/039;H01L21/027;(IPC1-7):G03F7/10
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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