METHOD AND DEVICE FOR DETECTING DEFECTS OF PATTERNS IN MICROELECTRONIC DEVICES,申请号EP19870100518-传众专利搜索

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发明名称	METHOD AND DEVICE FOR DETECTING DEFECTS OF PATTERNS IN MICROELECTRONIC DEVICES
摘要
申请公布号	EP0230285(A3)	申请公布日期	1989.10.25
申请号	EP19870100518	申请日期	1987.01.16
申请人	KABUSHIKI KAISHA TOYODA JIDOSHOKKI SEISAKUSHO;HATTORI, SHUZO	发明人	YOSHIDA, AKIHIRO KK TOYODA JIDOSHI SEISAKUSHO;IIDA, TAKAHIDE KK TOYODA JIDOSHI SEISAKUSHO;MIYAKE, HIROSHI KK TOYODA JIDOSHI SEISAKUSHO;HATTORI, SHUZO
分类号	G01N21/956;(IPC1-7):G01N21/88;G01N23/04;G06F15/70;H01L21/66	主分类号	G01N21/956
代理机构		代理人
主权项
地址

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