| 摘要 |
PURPOSE: To reduce the cost by coating an etching groove for forming an optical coupling edge partially with a first film of organic material, depositing a second film of organic material on the first film, patterning the second film and then forming a predetermined stripe waveguide pattern through etching by using the patterned second film as a mask. CONSTITUTION: An etching groove 3 made by wet chemical or dry etching and defining the light emission edge (mirror) 2 of a device 10 partially by the vertical side wall thereof is coated with a first photoresist film 5 and the region other than the groove 3 is exposed and developed before being removed. Subsequently, a second photoresist film 6 is deposited on the film 5 and then exposed in a predetermined pattern and developed in order to form an etching mask for a stripe waveguide. Finally, a predetermined stripe waveguide pattern 4 is formed by dry etching or wet chemical etching from a semiconductor plate piece 1 using the mask. According to the method, a low cost fabrication can be realized. |
