APPARATUS FOR GENERATING GAS STREAM ENRICHED WITH VAPOR OF LOW VOLATILE SUBSTANCE

摘要

PURPOSE: To stably obtain a higher energy flow of a low-volatile material by selecting the thickness, spacings or the like of perforated plates for partitioning the dimensions and internal spaces within an evaporator arranged within a thermostatic chamber in such a manner that the pressure drops in the respective sections attain specific relations. CONSTITUTION: Inert gas enters an inlet chamber 9 through a feeding pipe 6 like an arrow 4 and is subjected to the pressure dropΔPE through a thick porous gas inlet plate 10. This gas inlet plate 10 is pressed onto the powder bed 13 contg. the low-volatile material in the internal space 12 by a spring 11. The inert gas is passed through the powder bed 13 by the pressure dropΔPS and is satd. by the low-volatile material to be evaporated during this time. The satd. inert gas is then subjected to the pressure dropΔPA through the thin porous gas outlet plate 24 and is discharged to a gas outlet chamber 15. The gas is heated to a saturation temp. by a heating pipe 20 and is supplied to a reaction chamber by a high energy flow.