发明名称 |
Method for automated cassette handling |
摘要 |
An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.
|
申请公布号 |
US4875825(A) |
申请公布日期 |
1989.10.24 |
申请号 |
US19870119356 |
申请日期 |
1987.11.10 |
申请人 |
HEWLETT-PACKARD COMPANY |
发明人 |
TULLIS, BARCLAY J.;BAILEY, JOHN S.;GUNAWARDENA, D. R.;KAEMPF, ULRICH |
分类号 |
H01L21/677;H01L21/687 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|