| 摘要 |
PURPOSE:To improve the reliability of strength and thereby facilitate manufacturing by providing a structure in which first and second substrates sandwich a thin resistance layer and a thin electrode layer. CONSTITUTION:A first and second substrates 11, 14 are originally a monolithic substrate 30, and parts of the tips of a comb-like electrode 12 and electrodes arranged in parallel are patterned in a slightly overlapping manner. The overlapped section of the substrate 30 has scores 31 from the rear by means of laser beam. In addition, the tip section of the electrode is coated with an insulating agent excepting a section where a resistor 17 at the tip is arranged. The substrate 30 is folded into the first and second substrates 11, 14 and these substrates are integrated into a single body with the resistor 17 sandwiched between the former. The tips of the electrodes remaining on their respective substrates are removed by polishing of the edge surfaces of the substrates. In the above manner, the first and second substrates 11, 14 with electrodes can be manufactured simultaneously using a single monolithic substrate 30. |
