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发明名称
INDUCTION PLASMA DEVICE
摘要
申请公布号
JPH01265499(A)
申请公布日期
1989.10.23
申请号
JP19880095213
申请日期
1988.04.18
申请人
SANSHA ELECTRIC MFG CO LTD
发明人
YOMO KUNIO;SHINKAWA TSUTOMU;EMIRIO FUJIWARA
分类号
H05H1/30;B05B7/22
主分类号
H05H1/30
代理机构
代理人
主权项
地址
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