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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01265539(A)
申请公布日期
1989.10.23
申请号
JP19880093128
申请日期
1988.04.15
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
H01L21/3205;H01L21/31
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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