| 摘要 |
PURPOSE:To stabilize the output of a metal vapor laser very accurately by a method wherein the output of the laser is detected and a power supply to a heater is controlled basing on the detected result so as enable the control to function effectively. CONSTITUTION:A carrier gas feeder 20 is comparted with a partition 22 which varies in a carrier gas permeability depending on a temperature. A low pressure chamber 23 connected to the inside of a metal laser tube, a high pressure chamber 24 filled with the carrier gas of high pressure, and heaters 31 and 32 which control the partition 22 are provided inside the gas feeder 20. The output of a metal vapor laser oscillated from the metal vapor laser tube 10 is detected, and the output of the metal vapor laser is stabilized by controlling the power supply to the heaters 31 and 32 basing the detected result. Then, the output power change caused by change of the carrier gas pressure inside the laser tube 10 can be also effectively controlled. By these processes, a metal vapor laser can be very accurately stabilized in an output. |
