| 摘要 |
PURPOSE:To uniformly spread a cooling liquid on the substrate face and dissolve the dispersion of the machining quantity by feeding the cooling liquid to the unused portion of a tape and maintaining the tape pressed to the rotating disk substrate face in the wet state. CONSTITUTION:The second cooling liquid feed port 10 is arranged on the unused side of a contact roll 2 wound with a tape 1. A cooling liquid 5a is fed to the unused portion of the tape 1 through this feed port 10 to perform the tape texturing process. As a result, the cooling liquid 5a is infiltrated into the tape (for polishing and cleaning) 1 pressed to the rotating disk substrate D face and uniformly distributed on the disk substrate D face. The dispersion of the machining quantity is dissolved, a corrugated groove with uniform roughness can be formed on the disk substrate D. |
