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发明名称
CONVERGED ION BEAM DEVICE
摘要
申请公布号
JPH01264159(A)
申请公布日期
1989.10.20
申请号
JP19880090904
申请日期
1988.04.12
申请人
JEOL LTD
发明人
SAWARAGI HIROSHI
分类号
H01J37/22;H01J37/21;H01J37/317
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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