| 摘要 |
PURPOSE:To detect the direction and magnitude of magnetic field received by a magnetic body, by detecting the resistance value of a resistance element changed by the mechanical deformation of a magnetomotive body due to magnetic force. CONSTITUTION:When the magnetic force received by a magnetic body 7 is received by the induction part 6 of a semiconductor substrate 5, a flexible part 8 converts said force to mechanical deformation. A plurality of resistance elements having piezoelectric effect changing in electric resistance by mechanical deformation are provided to the substrate 5 supported on a case 2 being a fixed part by a part of the flexible part 8. By the arrangement of those elements, electric resistance due to stress received by each axial direction corresponding to three-dimensional coordinates is detected from the mechanical deformation of the flexible part 8. By detecting each resistance value, the direction and magnitude of the magnetic field received by the magnetic body 7 can be detected. |
