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经营范围
发明名称
LSI TESTING CIRCUIT
摘要
申请公布号
JPH01263573(A)
申请公布日期
1989.10.20
申请号
JP19880091381
申请日期
1988.04.15
申请人
HITACHI LTD
发明人
AOKI NOBUHIKO
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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