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发明名称
ECR PLASMA ETCHING APPARATUS
摘要
申请公布号
JPH01264224(A)
申请公布日期
1989.10.20
申请号
JP19880092516
申请日期
1988.04.14
申请人
NEC CORP
发明人
SAGAWA SEIJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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