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发明名称
EXTERNAL COMBUSTION APPARATUS
摘要
申请公布号
JPH01264228(A)
申请公布日期
1989.10.20
申请号
JP19880092518
申请日期
1988.04.14
申请人
NEC CORP
发明人
OGOSHI TAKAYUKI
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
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地址
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