| 摘要 |
PURPOSE:To enhance adhesion between a film base and a conductive layer, stability of the film against time lapse, and productivity of the film by ionizing metal particles evaporated in the vacuum evaporation process, accelerating said ions to give high kinetic energy, and allowing them to collide against the film base. CONSTITUTION:One of Pd, Pt, and Ir is sputtered toward the surface of the film base 4 by the vacuum evaporation process, ionized in an atmosphere 10 causing electric discharge, accelerated by an accelerating electrode 11, allowed to collide against the surface of the film base at high speed, and attached to said surface to form the conductive layer, thus permitting the obtained film to be superior in each of the adhesion between the film base and the conductive layer, stability against time lapse, surface conductivity, light transmittance, and productivity by selecting said metal and said processes. |
