发明名称 CONSTANT LEVEL SUPPLY OF A MERCURY EVAPORATION CELL FOR EPITAXY
摘要 <p>The present invention relates to the evaporation of mercury in vacuum conditions for the epitaxial growth of semiconductors, particularly semiconductors comprised of elements from groups II to VI of the periodical classification. According to the invention, there is provided a supply device for a mercury evaporation cell in vacuum conditions at a constant level. Said device is comprised of a mercury evaporation cell (1) associated with means (6, 7, 8, 9) for filling, bringing to level or emptying the mercury contained in the cell by displacement in vertical translation of the mercury supply means (12), said displacement being effected either manually or through motor means, optionally associated with electro-data processing control means.</p>
申请公布号 WO1989009847(P1) 申请公布日期 1989.10.19
申请号 FR1989000171 申请日期 1989.04.14
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