| 摘要 |
PURPOSE:To form a uniformly coating film steadily by providing a function capable of controlling temperature of a loading face of a turn table with a radial temperature gradient. CONSTITUTION:Nozzles 114A and 114B connected to respective temperature control lines 106A and 106B are installed for the purpose of blowing air con trolled at a low temperature against outer part of a turn table back side 117. On the other hand, nozzles 116A and 116B connected to respective temperature control lines 108A and 108B blow air controlled at a high temperature against inner part of the turn table tack side 117. The temperature of the turn table becomes high at the inner part and low at the outer part on account of air flow ejected out of these nozzles; therefore, a radial temperature gradient is formed, though a circumferential temperature is uniform. It is possible, by using this method, to form a film of a uniform thickness. |
