| 摘要 |
<p>This invention relates to a semiconductor module equipped with means for sealing an inert gas into a housing, storing therein hermetically a semiconductor chip and a cooling structure member, at a pressure equal to, or higher than, the pressure of cooling water, and for detecting an extremely small amount of gas leaking into the cooling water, at an early stage. The module can detect pin-holes generated by corrosion of the cooling structure member at an early stage through the leaking of the inert gas into the cooling water, and prevents the leaking of water to the outside of the cooling structure member. Furthermore, the present invention relates to the provision of an alarm device to prevent any accident of the semiconductor module caused by the leaking of the cooling water, a cooling system for stopping the operation of semiconductor devices on the basis of an alarm from the alarm device and a computer using the cooling system. The present invention provides an inert gas supply port in the housing, introduces the gas into the supply port and can inspect the joint portions of the cooling structure member.</p> |
