发明名称 Treatment device made of quartz glass
摘要 Treatment pipe made of quartz glass for semi-conductor technological processes. The treatment pipe is provided with a process gas supply pipe piece, into which the process gas flows tangentially via a process gas inlet pipe, the inlet pipe advantageously opening into the process gas supply pipe piece in the form of a nozzle. The process gas supply pipe piece is provided with a viewing glass at its closed end.
申请公布号 DE3810832(A1) 申请公布日期 1989.10.19
申请号 DE19883810832 申请日期 1988.03.30
申请人 HERAEUS QUARZSCHMELZE GMBH, 6450 HANAU, DE 发明人 SCHUELKE, KARL ALBERT, 6451 GROSSKROTZENBURG, DE
分类号 C30B31/16 主分类号 C30B31/16
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