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经营范围
发明名称
JIG FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH01262639(A)
申请公布日期
1989.10.19
申请号
JP19880092159
申请日期
1988.04.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
YANO SHOJI;TANAKA HIROSHI;YASHIRO MASAKAZU;AONO KOJI;SEGAWA KAZUAKI
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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