DEVICE FOR FORMING THIN-FILM,申请号JP19880092349-传众专利搜索

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发明名称	DEVICE FOR FORMING THIN-FILM
摘要
申请公布号	JPH01262628(A)	申请公布日期	1989.10.19
申请号	JP19880092349	申请日期	1988.04.14
申请人	HITACHI LTD	发明人	TAMAOKI MASUKAZU;KASAHARA OSAMU
分类号	C23C14/56;H01L21/205;H01L21/31	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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