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发明名称
METHOD OF VAPOR GROWTH OF HIGH-RESISTANCE ALGAAS MIXED CRYSTAL
摘要
申请公布号
JPH01261818(A)
申请公布日期
1989.10.18
申请号
JP19880089889
申请日期
1988.04.12
申请人
FUJI ELECTRIC CO LTD
发明人
KUNIHARA KENJI;MATSUBARA KUNIO;SHINDO YOICHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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