| 摘要 |
<p>PURPOSE:To place a wafer into a container smoothly by providing a plurality of wafer detecting parts at the lower part of the position for containing the wafer, providing an operating part which computes the position and the speed of the wafer, and controlling the position of an elevator for lifting and lowering the wafer container based on signals from the operating part. CONSTITUTION:A wafer is inserted into the groove of a wafer container that is mounted on a wafer-container setting plate 1b with a belt 3b. At this time, the position signals of the wafer are sent into an operating part 5b from a plurality of wafer detectors 4b which are provided at the lower part of the wafer container. The position of the wafer and the speed of the wafer are computed in the operating part 5b. When the wafer is stopped in the middle or is hard to enter the wafer container, a lifting elevator is moved up and down with a position control part 6b, and the wafer is inserted smoothly. The fact that the wafer is completely inserted into the wafer container is detected with a detecting part 4b. The wafer-container lifting elevator is lifted up by one pitch.</p> |
