| 摘要 |
PURPOSE:To prevent faults and accidents due to the occurrence of leak, rust and the like, and to obtain a highly accurate silent discharge gas laser device characterized by high output power and a compact configuration, by cooling a dielectric electrode with a gas as a cooling medium, and composing the dielectric electrode of an approximately cylindrical dielectric and a conductor in contact with the inner surface of the dielectric having an arbitrary cross sectional shape. CONSTITUTION:A metal conductor 3b having a semicircular cross section is brought into contact with the inner surface of a dielectric 3a in an dielectric electrode 3. Air as a cooling medium is made to flow in the dielectric electrode 3, and the dielectric electrode 3 is cooled. The device can be also formed as follows. Pipe shaped metal is cut in the longitudinal direction, and the metal conductor 3b is obtained. The metal conductor 3b is in contact with the inner surface of the dielectric 3a in the dielectric electrode, or as a reinforcing member when the dielectric 3a is made thin, a member 3d is brought into contact with inner surface other than the inner contact part of the dielectric 3a and the metal conductor through an insulator shim 3e. Thus the dielectric electrode is obtained. |
