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发明名称
LASER ANNEALING PROCESS
摘要
申请公布号
JPH01261291(A)
申请公布日期
1989.10.18
申请号
JP19880089299
申请日期
1988.04.13
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
OGURA ATSUSHI
分类号
C30B1/08;C30B29/06;H01L21/324
主分类号
C30B1/08
代理机构
代理人
主权项
地址
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