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发明名称
HEATING APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPH01260836(A)
申请公布日期
1989.10.18
申请号
JP19880088214
申请日期
1988.04.12
申请人
FUJITSU LTD
发明人
KURAHASHI TOSHIO;INOUE NORIYUKI
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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