| 摘要 |
PURPOSE:To perform alignment accurately and with ease as well, by using an optical image obtained through a lens which is formed at the first object as an alignment mark in the case of relative alignment between more than two objects. CONSTITUTION:A lens 102 is provided on the first object 103 and the focus 13 is located on the surface of the second object 104. An alignment mark 106 corresponding to a focusing form is put in advance on the surface of the second object and the positional relation between two objects 103 and 104 is kept fixed by bringing a focus formed by the lens at the center of this mark. A incident light beam is condensed at positions which are spatially apart from respective positions having lenses, for example, in a dot 105 when a circular lens is applied; in a line 205 when a barrel like lenticular lens is applied; and further, in a ring 305 when a doughnut-type annular lens is applied. |
