| 摘要 |
PURPOSE:To obtain O3 of high concn. and high purity by introducing O3-O2 mixed gas into an O3-liquifying chamber to cool to the temp. between the boiling point of O3 and the boiling point of O2 to obtain liquified O3 and introducing the obtained liquified O3 to a vaporization chamber to evaporate it again. CONSTITUTION:The O3-liquifying chamber 3 with the heater 14 for liquifying chamber surrounding the chamber is provided in the main body 11 of the O3-concn. device 10 covered with an insulating material 12, and the O3-vaporization chamber 16 with the heater 17 for vaporization chamber surrounding the chamber is connected with the bottom part of the liquifying chamber through a connecting pipe 15, and the cooling medium supply pipe 23 is provided on the main body 11 so as to supply a cooling medium such as liquified nitrogen. The O3-O2 mixed gas produced in an O3-generator 1 is introduced to the liquifying chamber 13 through an inlet pipe 18, and is cooled to the temp. between the boiling point of O3 and the boiling point of O2 by the cooling medium and the heater 14 to liquify only O3 which is separated in the bottom part, and only the gaseous O2 is discharged from an O2-discharge pipe 20. The liquified O3 is sent to the O3-vaporization chamber through the connecting pipe 15 to be heated by the heater 17 to the temp. higher than the boiling point to be vaporized, and sent to a consumption place through an O3-outlet pipe 22. |
