发明名称 TEST HEAD MANIPULATOR FOR AUTOMATIC TESTER
摘要 PURPOSE: To make possible the rotation of unsymmetrical type test head by providing an adjustment means for maintaining an orientation means so as to prevent the orientation means from being tilted around a horizontal axis under the unbalance weight of a test head. CONSTITUTION: This device has a base plate 13 and is provided with a positioning means 15 in which a strut assembly 14 is based thereon and by which a head orienting means 16 can be displaced in three-dimensional directions x, y, z. The orienting means 16 gives two additional motions to a test head, namely gives rotational motion around a horizontal axisθx and rotational motion around an axisθy . In order to prevent the orienting means 16 from being tilted around the horizontal axisθx . under the unbalance weight of the test head, an adjustment means 94 for a split flange of maintaining the orienting means 16 is provided. Therefore, a test head 11 can be moved and the unsymmetrical test head 11 can be rotated around two axes.
申请公布号 JPH01257342(A) 申请公布日期 1989.10.13
申请号 JP19880231509 申请日期 1988.09.17
申请人 SCHLUMBERGER IND 发明人 RUI BOKUU;JIYAN BONKONPEI
分类号 G01R31/00;B23Q1/48;B25J11/00;G01R1/067;G01R31/28;G12B9/08;H01L21/66 主分类号 G01R31/00
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