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发明名称
MEASURING THE THICKNESS OF THIN DIELECTRIC FILM
摘要
申请公布号
GB2216651(A)
申请公布日期
1989.10.11
申请号
GB19890004641
申请日期
1989.03.01
申请人
* NANOMETRICS INC
发明人
VINCENT J * COATES;WARREN W * LIN
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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