NEGATIVE RESIST MATERIAL, METHOD FOR ITS MANUFACTURE AND METHOD FOR USING IT,申请号EP19870306572-传众专利搜索

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发明名称	NEGATIVE RESIST MATERIAL, METHOD FOR ITS MANUFACTURE AND METHOD FOR USING IT
摘要
申请公布号	EP0255303(B1)	申请公布日期	1989.10.11
申请号	EP19870306572	申请日期	1987.07.24
申请人	OKI ELECTRIC INDUSTRY COMPANY, LIMITED	发明人	ITO, TOSHIO OKI ELECTRIC INDUSTRY CO., LTD.;YAMASHITA, YOSHIO OKI ELECTRIC INDUSTRY CO., LTD;SAKATA, MIWA OKI ELECTRIC INDUSTRY CO., LTD
分类号	G03F7/075;C08G77/24;G03F7/09	主分类号	G03F7/075
代理机构		代理人
主权项
地址

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