发明名称 Interferometer for measuring optical phase differences
摘要 For generating several interferograms which differ from each other in the relative phase position between the interfering partial beams, a light source is utilized having a coherence length less than the optical path difference between the two component beams in the measuring path of the interferometer. Furthermore, at least one optical delay device is provided which splits the beam into two component beams and which generates an optical path difference between these component beams which is approximately the same as the optical path difference of the partial beams in the measuring path of the interferometer. Thereafter, the delay device again unites the component beams congruently.
申请公布号 US4872755(A) 申请公布日期 1989.10.10
申请号 US19880164790 申请日期 1988.03.07
申请人 CARL-ZEISS-STIFTUNG 发明人 KUECHEL, MICHAEL
分类号 G01B9/02;G01J9/02;G02B6/28 主分类号 G01B9/02
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