发明名称 |
Scanning optical microscope using single laser beam |
摘要 |
A scanning optical microscope which comprises a source of optical radiation and means for focussing radiation from the source into an interrogating spot on a surface under examination. The spot is deflected about a point on the surface, and the surface topography is measured by measuring the amplitude and/or phase of the radiation reflected from the surface at the spot position.
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申请公布号 |
US4873434(A) |
申请公布日期 |
1989.10.10 |
申请号 |
US19870075508 |
申请日期 |
1987.07.20 |
申请人 |
NATIONAL RESEARCH DEVELOPMENT CORPORATION |
发明人 |
SEE, CHUNG W.;VAEZ-IRAVANI, MEHDI |
分类号 |
G01B11/30;G02B21/00 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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