DEVICE FOR PRODUCING ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To increase the density of plasma and to stably maintain plasma under low pressure of gas by incorporating magnets generating a magnetic field having a specified intensity into a magnetic field applied plasma CVD device. CONSTITUTION:When an electrophotographic sensitive body having an amorphous silicon film is produced with the magnetic field applied plasma CVD device, the intensity of a magnetic field generated by magnets incorporated into the device is regulated to 700-1,000G on a cathode. Plasma is effectively confined by a leakage magnetic field to increase the density and plasma is stably maintained under low pressure of gas. Accordingly, the average free range of particles is extended, the amt. of dust is minimized and film formation at a high rate is enabled.