发明名称 METHOD OF TRIMMING RESISTOR FILM
摘要 <p>PURPOSE:To prevent dust from being produced by shortening the time for trimming by forming a notch in a resistor film along a line surrounding a region of the resistor film to be removed and prohibiting said region from being supplied with a power after the formation of the notch. CONSTITUTION:Resistance between electrodes 11 and 12 are monitored, and at the same time a notch 14a is formed from one marginal edge of a resistor film 13 toward a direction normal to a straight line which defines an interelectrode distance. Then, the direction of the notch 14b is changed, and a new notch 14b is formed in a direction parallel to the straight line defining the distance between the electrodes 11 and 12. The notch 14b is extended, with the resistance between the electrodes 11 and 12 being monitored, to its length where the resistance is accurately purposed one. Thus, the resistor film 13, in which the resistance between the electrodes 11 and 12 is the purposed one, is yielded. Hereby, trimming time is shortened to prevent any dust from being produced.</p>
申请公布号 JPH01253206(A) 申请公布日期 1989.10.09
申请号 JP19880079839 申请日期 1988.03.31
申请人 HOYA CORP 发明人 SUZUKI KATSUNAO;NAKAMURA YUKI
分类号 H01C17/24;H01L27/01;H05K1/16 主分类号 H01C17/24
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