| 摘要 |
PURPOSE:To attain to equalize an atmospheric condition between batches and an evaporation speed of an evaporative substance as well as to optimize a control condition every each batches by carrying out a process management in high frequency exciting type ion plating by an electron impact quanomenter. CONSTITUTION:N2 and Ar in a bell jar 4 are excited by a high frequency coil electrode 11 to carry out discharge. A heater 7 for generating thermoelectron and a power source 9 of an electron gun are operated and an evaporative substance, for example, a Ti material heated and evaporated by electron beam 10 and ionized along with N2 by the electrode 11. Then, a titanium nitride film is formed on a substrate plate as well as the resultant ionized fluid is passed through a sensor part 15 of an electron impact quanometer as a fluid to be analyzed to introduce generated photon to a spectroscopic anlizer 8. Output of the analizer shows a passing amount of a Ti vapor. From the passing amount, a signal converted to a forming speed formed on the substrate plate, a film thickness, a Ti eveporation speed or the like is obtained and, by this output signal, output current of the power source 9 is adjusted an evaporation speed of the Ti material to a predetermined value. |
