| 摘要 |
PURPOSE:To obtain a base plate for defect test permitting exact tests easily by constituting at least the surfacial part of a thin film formed on the surface of a light transmissive base plate of Al contg. nitrogen and oxygen, thus reproducing a fine pattern which is an object of the defect test, on the thin film. CONSTITUTION:A thin film 2 consisting of Al contg. nitrogen and oxygen is formed on the surface of a light transmissive base plate 1 for defect test. Using said thin film as a test piece, and a fine pattern 3 corresponding to a fine pattern of a master mask which is an object of the defect test, is formed on the thin film 2. By carrying out a defect test in the fine pattern 3 formed on the test piece, presence of defect in the fine pattern of the master mask is also tested. Thus, a defect test is performed exactly and easily. |
