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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH01251710(A)
申请公布日期
1989.10.06
申请号
JP19880078777
申请日期
1988.03.31
申请人
TOSHIBA CORP
发明人
HONDA YASUAKI;AKAGAWA KEIICHI;HARAGUCHI TAKASHI
分类号
H01L21/205;C23C16/44;C30B25/14
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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