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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01251722(A)
申请公布日期
1989.10.06
申请号
JP19880078645
申请日期
1988.03.31
申请人
ROHM CO LTD
发明人
ICHIHARA ATSUSHI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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